Polling stations guarded by troops and armoured vehicles opened at 8:00 am and closed at 6:00 pm local time with the first preliminary results expected later in the evening.
Officials said that the turnout surpassed 60 percent of the almost 600,000 registered voters, including 34,000 Russian soldiers stationed in the volatile Caucasus province.
About 350 candidates were running for the 18-seat Republican Council and the 40-seat People's Assembly.
Candidates included five officers with the Russian armed forces and officials with the pro-Russian Chechen administration.
The Kremlin and the local administration it backs in Grozny have been talking up Sunday's vote, with President Vladimir Putin characterising it as proof that life was returning to normal in Chechnya after years of war.
But international and Russian human rights groups have shown less enthusiasm, describing the vote as a charade.
About four hours after polling opened, officials reported turnout had surpassed the 25 percent needed for the ballot to be pronounced valid.
"We can say the elections are valid," Chechen President Alu Alkhanov told reporters in the eastern city of Tsentoroi after voting in his hometown of Urus-Martan in the south.
No fraud reports
No complaints or reports of electoral fraud had been filed, said Chechnya's Prosecutor Valery Kuznetsov while praising "all political parties and candidates who fought in a very correct manner, without any dirty technologies."
The powerful deputy prime minister in the province's Moscow-backed government, Ramzan Kadyrov, said the elections were a step in the "most important period in recent years."
"Today we are choosing a parliament as happens in other parts of Russia," said Mr Kadyrov.
He is the son of late Chechen president Akhmad Kadyrov whose term came to a violent end 18 months ago when he was assassinated in a bomb attack in Grozny.
"I will consider my father's work done when the shooting and killing of people stops," he said.
Sunday's vote is the fourth in two years, following a constitutional referendum and two presidential elections.
Security has been heavily reinforced for fear of attacks by Chechen separatist fighters.
Russian news agencies reported that three landmines were discovered on a road after Mr Alkhanov had travelled on it. They were defused without incident.
The Organisation for Security and Cooperation in Europe has declined to send poll monitors, citing reasons including security concerns.
The Russian authorities said 23,000 observers, either Russian or from other former Soviet republics, were monitoring the vote.
The walls of Grozny were covered with posters of the pro-Kremlin party United Russia, saying: "For the good of the people and the honor of the Chechen republic."
Other parties, including the Communists and the liberal SPS party, also put up posters.
Chechen security
Throughout the province, residents said they were less interested in who won the elections than in seeing the process lead to better security and more economic opportunity.
"If the deputies are going to work, something will change," said Akhmed Gilihanov, a farmer in the western Chechen village of Bratskoye.
"The most important thing is for people to have work and for the banditry to end. I want people to live like they do elsewhere in Russia."
One 45-year-old man in the village of Pobedinskoye who would only provide his first name, Umar, was not optimistic about the vote.
"Ramzan (Kadyrov) has grabbed all the power," he said, accusing local authorities of "stealing" from the people.
"It's no good if the new deputies are just going to serve their own interests ... my home was destroyed in the second war and I still haven't received compensation," he said.
Russian troops entered Chechnya in October 1999 to try to re-establish control following defeat in a first war against separatist guerrillas in 1994-96.
Although major clashes have become rare, Russian forces and their Chechen allies continue to suffer casualties on an almost daily basis.