A spokesperson for Home Affairs minister Peter Dutton said 22 refugees have made the trip as part of a deal struck between former US president Barack Obama and Prime Minister Malcolm Turnbull.
Afghans, Pakistanis and Rohingyans, as well as one Tamil family were among those to depart, according to Refugee Action Coalition spokesman Ian Rintoul.
Advocates claim the flight still leaves behind over 900 refugees and asylum seekers on Nauru, including around 130 children.