The occasion seemed to overwhelm one of the little girls, believed to be the youngest, Zalie Warren.
The two-year-old had to be picked up and comforted by Prince George and Princess Charlotte's nanny before she made her way into the church.
She is one of Prince Harry's goddaughters and the daughter of one of his best friends, Jake Warren, and his wife Zoe.
However, the youngster was not the only one to go off-script, with Charlotte apparently showing off her mischievous side as she was driven to the venue.
A picture believed to be the two-year-old shows her cheekily sticking her tongue out, and waving from the car window.
The young princess also drew attention when she waved enthusiastically as the carriage with Harry and Meghan pulled away.
The Duchess of Cambridge had moments earlier bent down to her daughter and said "look at the carriage", according to lip reader Tina Lannin.
Prince George stood behind her, holding the Duke of Cambridge's hand.
The other bridesmaids were Harry's goddaughters three-year-old Florence van Cutsem, Meghan's goddaughters, Remi and Rylan Litt, six and seven respectively, and four-year-old Ivy Mulroney.
As well as George, the pageboys were Harry's godson Jasper Dyer, six, and seven-year-old twin brothers Brian and John Mulroney, who held the bride's veil as she walked into the chapel.
The twins' mother Jessica Mulroney, a close friend of Meghan's, posted on Instagram: "Proud friend. Proud mom."
Each of the children were given a memento of the the big day.
The six young girls were wearing white leather Aquazurra shoes, each monogrammed with the bridesmaid's initials, and the wedding date.
Kensington Palace said they were a gift from Meghan as a keepsake of the special day.
The four boys had their initials embroidered in gold on their shoulder straps, as their memento.
The boys wore a miniature version of the Blues and Royals frockcoat that Harry and the Duke of Cambridge wore.
Made from blue doeskin, they were single-breasted with a stand-up collar and figured braiding of Regimental pattern.
Their trousers were made of blue/black wool barathea with three-quarter scarlet stripes fastened with a leather strap.
The uniforms were cut and made by the tailors Dege & Skinner in Savile Row.
Clare Waight Keller, who designed the bridal gown, also designed the bridesmaids' dresses in the Givenchy Haute Couture Atelier in Paris.
They were made of ivory silk radzimir, and were high-waisted with short puff sleeves, hand finished with a double silk ribbon detail tied at the back in a bow.
The bridesmaids' dresses included pockets and pleated skirt.
Each little girl also wore a flower crown chosen by Harry and Meghan, which replicated the flowers used in the bridal bouquet.
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